Case 262, Campus de St Jérôme
Avenue Escadrille Normandie Niemen
13397 Marseille cedex 20
Contraintes mécaniques et déformations dans les matériaux de la microélectronique
Electronique flexible et photovoltaïque organique
Diffraction des rayons X
| Publications |
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| Charlotte Kutyla, Clément Bessouet, Sylvain Lemettre, Laetitia Leroy, Philippe Coste, Alain Bosseboeuf, Johan Moulin, Thierry Sauvage, Aurelien Bellamy, Olivier Wendling, Piyush Jagtap, Olivier Thomas, Stephanie Escoubas, Christophe Guichet, Activation and gas sorption of Y-based getter films for wafer-level vacuum packaging of microsensors, Journées Nationales des Technologies Emergentes (JNTE), 2022 () (hal-04365009) |
| Charlotte Kutyla, Clément Bessouet, Sylvain Lemettre, Philippe Coste, Alain Bosseboeuf, Thierry Sauvage, Aurelien Bellamy, Olivier Wendling, Piyush Jagtap, Stephanie Escoubas, Christophe Guichet, Olivier Thomas, Johan Moulin, Etude par faisceaux d’ions de la sorption en hydrogène de matériaux getter à base d’yttrium, Matériaux 2022, 2022 () (hal-04505146) |
| Charlotte Kutyla, Clément Bessouet, Sylvain Lemettre, Alain Bosseboeuf, Philippe Coste, Thierry Sauvage, Olivier Wendling, Aurelien Bellamy, Piyush Jagtap, Stephanie Escoubas, Christophe Guichet, Olivier Thomas, Johan Moulin, Hydrogen annealing and analysis in yttrium and titanium getter films, International Vacuum Conference (IVC 2022), 2022 () (hal-04505105) |
| Clément Bessouet, Charaf-Eddine Bejjit, Charlotte Kutyla, Sylvain Lemettre, Alain Bosseboeuf, Philippe Coste, Thierry Sauvage, Olivier Wendling, Aurelien Bellamy, Pratik D Jagtap, Stephanie Escoubas, Christophe Guichet, Olivier Thomas, Johan Moulin, Activation of getter films for MEMS packaging studied by in situ NRA, 22nd International Vacuum Congress, 2022 () (hal-03836025) |
| Charlotte Kutyla, Clément Bessouet, Sylvain Lemettre, Laetitia Leroy, Alain Bosseboeuf, Philippe Coste, Thierry Sauvage, Olivier Wendling, Aurelien Bellamy, Piyush Jagtap, Stephanie Escoubas, Christophe Guichet, Olivier Thomas, Johan Moulin, Hydrogen sorption of yttrium-based getter thin films, Vacuum, 2022, 207, pp.1-10 (10.1016/j.vacuum.2022.111655) (hal-04505353) |
| Estéban Sanchez-Adaime, D. Duché, Stephanie Escoubas, V. Jangid, L. Nony, A. Moreau, J. Lumeau, Lionel Patrone, C. Lebouin, L. Escoubas, Atomic force microscopy and in situ-annealing X-ray diffraction study on template-stripped gold substrates for optimum self-assembled monolayer deposition, Thin Solid Films, 2021, 739, pp.138978 (10.1016/j.tsf.2021.138978) (hal-03436579) |
| Mouaad Yassine Aliouat, Dmitriy Ksenzov, Stephanie Escoubas, Jörg Ackermann, Dominique Thiaudière, Cristian Mocuta, Mohamed Cherif Benoudia, David Duche, Olivier Thomas, Souren Grigorian, Direct Observations of the Structural Properties of Semiconducting Polymer: Fullerene Blends under Tensile Stretching, Materials, 2020, 13, pp.3092 (10.3390/ma13143092) (hal-02929463) |
| Mouaad Yassine Aliouat, Stephanie Escoubas, Mohamed Chérif Benoudia, Dmitriy Ksenzov, David Duché, Evangéline Bènevent, Christine Videlot-Ackermann, Jörg Ackermann, Olivier Thomas, Souren Grigorian, In situ measurements of the structure and strain of a π-conjugated semiconducting polymer under mechanical load, Journal of Applied Physics, 2020, 127, pp.045108 (10.1063/1.5127226) (hal-02495485) |
| Thomas W Cornelius, Cristian Mocuta, Stephanie Escoubas, Luiz R M Lima, Eudes B Araújo, Andrei Kholkin, Olivier Thomas, Piezoelectric Properties of Pb1−xLax(Zr0.52Ti0.48)1−x/4O3 Thin Films Studied by In Situ X-ray Diffraction, Materials, 2020, 13, pp.3338 (10.3390/ma13153338) (hal-02907382) |
| Rajkiran Tholapi, Manon Gallard, Nelly Burle, Christophe Guichet, Stephanie Escoubas, Magali Putero, Cristian Mocuta, Marie‐ingrid Richard, Rebecca Chahine, Chiara Sabbione, Mathieu Bernard, Leila Fellouh, Pierre Noé, Olivier P Thomas, Stress Buildup Upon Crystallization of GeTe Thin Films: Curvature Measurements and Modelling, Nanomaterials, 2020, 10, pp.1247 (10.3390/nano10061247) (hal-02903089) |
| Stephanie Escoubas, B. Vianne, Marie‐ingrid Richard, A. Farcy, V. Fiori, O. Thomas, Strain Distribution Induced in SOI Photonic Substrate by Through Silicon via Using Advanced Scanning X-Ray Nano-Diffraction, IEEE Transactions on Device and Materials Reliability, 2018, 18, pp.529-533 (10.1109/TDMR.2018.2881418) (hal-02114463) |
| Laure Biniek, Amer Hamidi-Sakr, Linda Grodd, Stephanie Escoubas, Y. J. Dappe, Souren Grigorian, M. Schmutz, Martin Brinkmann, Structure and charge transport anisotropy of polythieno[3,4- b ]-thiophene- co -benzodithiophene (PTB7) oriented by high-temperature rubbing, Advanced Electronic Materials, 2018, 4, pp.1700480 (10.1002/aelm.201700480) (hal-02023024) |
| B. Ben Yahia, M.S. Amara, M. Gallard, N. Burle, Stephanie Escoubas, C. Guichet, Magali Putero, Cristian Mocuta, Marie‐ingrid Richard, R. Chahine, C. Sabbione, M. Bernard, L. Fellouh, P. Noé, O. Thomas, In situ monitoring of stress change in GeTe thin films during thermal annealing and crystallization, Micro and Nano Engineering, 2018 (10.1016/j.mne.2018.10.001) (hal-01951257) |
| M. Gallard, Mohamed Amara, Cristian Mocuta, Magali Putero, Stephanie Escoubas, C. Guichet, N. Burles, Marie‐ingrid Richard, L. Fellouh, M. Bernard, R. Chahine, P. Kowalczyk, C. Sabbione, A. André, N. Bernier, A. Kolb, Ariel Brenac, R. Morel, Françoise Hippert, P. Noé, O. Thomas, Matériaux à Changement de Phase : Mécanisme de Transition amorphe – cristalline et influence de l’épaisseur, l’exemple du GeTe, Rayons X et Matière, RX2017, 2017 () (hal-01763098) |
| Thomas W. Cornelius, Cristian Mocuta, Stephanie Escoubas, A. Merabet, Michael Texier, E.C. Lima, E.B. Araujo, a L Kholkin, Olivier P Thomas, Piezoelectric response and electrical properties of Pb(Zr 1-x Ti x )O 3 thin films: The role of imprint and composition, Journal of Applied Physics, 2017, 122, pp.164104 - 164104 (10.1063/1.4994939) (hal-01793333) |
| S. Grigorian, Stephanie Escoubas, D. Ksenzov, D. Duche, M. Aliouat, J.-J. Simon, B. Bat-Erdene, S. Allard, U. Scherf, U. Pietsch, O. Thomas, A Complex Interrelationship between Temperature-Dependent Polyquaterthiophene (PQT) Structural and Electrical Properties, Journal of Physical Chemistry C, 2017, 121, pp.23149-23157 (10.1021/acs.jpcc.7b02489) (hal-02114478) |
| M. Gallard, M.S. Amara, F. Lauraux, C. Guichet, Stephanie Escoubas, Marie‐ingrid Richard, Cristian Mocuta, P. Noé, C. Sabbione, Françoise Hippert, Magali Putero, N. Burle, O. Thomas, Study of the microstructure and stress induced during the crystallization of GeTe thin films, E/PCOS 2017, European Phase Change and Ovonics Symposium, 2017 () (hal-01781812) |
| M.Y. Aliouat, Stephanie Escoubas, L. Grodd, S. Grigorian, D. Duche, M. C. Benoudia, O. Thomas, Structural, mechanical and optical properties of conjugated polymers on a stretchable substrate under mechanical load, 23ème Congrès Français de Mécanique CFM 2017, 2017 () (hal-01781807) |
| M. Gallard, Cristian Mocuta, Mohamed Amara, C. Guichet, P. Noé, C. Sabbione, Marie‐ingrid Richard, Magali Putero, Stephanie Escoubas, Ariel Brenac, R. Morel, Françoise Hippert, O. Thomas, Study of Amorphous - Crystalline Phase Transition in Phase Change Materials, European Materials Research Society, E-MRS, 2017 () (hal-01753416) |
| M. Gallard, M.S. Amara, F. Lauraux, C. Guichet, Marie‐ingrid Richard, Stephanie Escoubas, Cristian Mocuta, P. Noé, C. Sabbione, Françoise Hippert, Magali Putero, N. Burle, O. Thomas, In-situ combined X-Ray diffraction and optical curvature measurements to study microstructure and stress induced during the crystallization of GeTe thin films, MAM2017 – Materials for Advanced Metallization Conference, 2017 () (hal-01781799) |
| M.Y. Aliouat, Stephanie Escoubas, D. Duche, S. Grigorian, L. Grodd, M.C. Benoudia, O. Thomas, Structural, mechanical and optical properties of conjugated polymers under mechanical load and temperature annealing, MAM2017 – Materials for Advanced Metallization Conference, 2017 () (hal-01781802) |
| M. Gallard, Cristian Mocuta, Mohamed Amara, C. Guichet, P. Noé, C. Sabbione, Marie‐ingrid Richard, Magali Putero, Stephanie Escoubas, Ariel Brenac, R. Morel, Françoise Hippert, O. Thomas, Amorphous - Crystalline Phase Transition in Phase Change Materials, Soleil User Meeting, SUM2017, 2017 () (hal-01753399) |
| Soraya Gouder, Larbi Tebessi, Radane Mahamdi, Stephanie Escoubas, Luc Favre, Mansour Aouassa, Antoine Ronda, Isabelle Berbezier, TEM and XRD characterizations of epitaxial silicon layer fabricated on double layer porous silicon, Materials Research Forum, 2016, 1, pp.249--252 (10.21741/9781945291197-62) (hal-01811398) |
| Thomas W. Cornelius, Cristian Mocuta, Stephanie Escoubas, E.C. Lima, E.B. Araujo, O. Thomas, In situ piezoelectric studies of PZT thin films by X-ray microdiffraction, 13th Biennial Conference on High Resolution X-Ray Diffraction and Imaging (XTOP2016), 2016 () (hal-01453231) |
| M. Gallard, Cristian Mocuta, P. Noé, C. Sabbione, Françoise Hippert, F. Lauraux, C. Guichet, Magali Putero, Stephanie Escoubas, Marie‐ingrid Richard, Ariel Brenac, R. Morel, O. Thomas, Study of Crystalline - Amorphous Phase Transition in Phase Change Materials, Meeting of the French Crystallography Association (AFC 2016), 2016 () (hal-01454850) |
| Thomas W. Cornelius, Cristian Mocuta, Stephanie Escoubas, E.C. Lima, E.B. Araujo, O. Thomas, In situ X-ray diffraction studies of the piezoelectric behavior of PZT thin films, Meeting of the French Crystallography Association (AFC 2016), 2016 () (hal-01453244) |
| B. Vianne, Stephanie Escoubas, Marie‐ingrid Richard, V. Fiori, A. Farcy, O. Thomas, Effect of the temperature on the strain distribution induced in SOI photonic substrate by copper filled TSVs, using advanced scanning X-ray nano- diffraction, 14th International Conference Reliability and Stress-Related Phenomena in Nanoelectronics–Experiment and Simulation, 2016 () (hal-01454838) |
| B. Vianne, Stephanie Escoubas, C. Krauss, Marie‐ingrid Richard, Stéphane Labat, G. Chahine, S. Micha, T. Schulli, V. Fiori, A. Farcy, O. Thomas, Temperature dependency of the strain distribution induced by TSVs in silicon: A comparative study between micro-Laue and monochromatic nano-diffraction, Microelectronic Engineering, 2016, 156, pp.59-64 (10.1016/j.mee.2016.03.003) (hal-02114595) |
| Y. Ezzaidi, Stephanie Escoubas, G. Gaudeau, D. Benoit, P Morin, O. Thomas, Evaluating Young’s modulus in silicon nitrides via the refinement of the diffraction pattern from silicon strained by nitride lines, Advanced Metallization, MAM 2016, 2016 () (hal-01454833) |
| Stephanie Escoubas, B. Vianne, Marie‐ingrid Richard, V. Fiori, A. Farcy, O. Thomas, Strain distribution induced in SOI photonic substrate by TSVs, using advanced X- ray nano-diffraction, Materials for Advanced Metallization, MAM 2016, 2016 () (hal-01454828) |
| Mariam Dème Dankoco, Evangéline Bènevent, Laurent Gallais, Stephanie Escoubas, Marc Bendahan, Metallic temperature sensors on flexible substrate: Direct laser patterning, Inkjet printing, Sensors Energy harvesting wireless Network & Smart Objects Conference (SENSO) 2015, 2015 () (hal-01698562) |
| B. Vianne, Marie‐ingrid Richard, Stephanie Escoubas, Stéphane Labat, T. Schulli, G. Chahine, V. Fiori, O. Thomas, Through-silicon via-induced strain distribution in silicon interposer, Applied Physics Letters, 2015, 106, pp.141905 (10.1063/1.4915604) (hal-02114606) |
| B. Vianne, Stephanie Escoubas, Marie‐ingrid Richard, Stéphane Labat, G. Chahine, T. Schulli, A. Farcy, P. Bar, V. Fiori, O. Thomas, Strain and tilt mapping in silicon around copper filled TSVs using advanced X-ray nano-diffraction, Microelectronic Engineering, 2015, 137, pp.117-123 (10.1016/j.mee.2014.12.011) (hal-02114614) |
| Stephanie Escoubas, Benjamin Vianne, Pierre Bar, Vincent Fiori, Sebastien Gallois-Garreignot, Komi Atchou Ewuame, Pascal Chausse, Stephanie Escoubas, Nicolas Hotellier, Olivier Thomas, Thermo-mechanical characterization of passive stress sensors in Si interposer, Microelectronics Reliability, 2015, 55, pp.738-746 (10.1016/j.microrel.2015.02.005) (hal-02114621) |
| S. Gouder, R. Mahamdi, Mansour Aouassa, Stephanie Escoubas, Luc Favre, A. Ronda, Isabelle Berbezier, Investigation of microstructure and morphology for the Ge on porous silicon/Si substrate hetero-structure obtained by molecular beam epitaxy, Thin Solid Films, 2014, 550, pp.233--238 (10.1016/j.tsf.2013.10.183) (hal-01811407) |
| S. Gouder, R. Mahamdi, Mansour Aouassa, Stephanie Escoubas, Luc Favre, A. Ronda, Isabelle Berbezier, FTIR and AFM studies of the Ge on Porous Silicon/Si substrate hetero-structure obtained by molecular beam epitaxy, Journal of New Technology and Materials, 2014, 4, pp.112--115 () (hal-01811404) |
| Isabelle Berbezier, Jean-Noël Aqua, Mansour Aouassa, Luc Favre, Stephanie Escoubas, Adrien Gouye, Antoine Ronda, Accommodation of SiGe strain on a universally compliant porous silicon substrate, Physical Review B: Condensed Matter and Materials Physics (1998-2015), 2014, 90, pp.035315 (10.1103/PhysRevB.90.035315) (hal-01238952) |
| Mansour Aouassa, Stephanie Escoubas, A. Ronda, Luc Favre, S. Gouder, R. Mahamdi, E. Arbaoui, A. Halimaoui, Isabelle Berbezier, Ultra-thin planar fully relaxed Ge pseudo-substrate on compliant porous silicon template layer, Applied Physics Letters, 2012, 101, pp.233105--233105--5 (10.1063/1.4769040) (hal-01811415) |
| Mahfoudh Raïssi, G. Regula, C. Hadj Belgacem, N. Rochdi, Stephanie Escoubas, C. Coudreau, B. Holländer, M. Fnaiech, F.A. d'Avitaya, J.-L. Lazzari, Different Architectures of Relaxed Si1-xGex/Si Pseudo-Substrates Grown by Low-Pressure Chemical Vapor Deposition: Structural and Morphological Characteristics, Journal of Crystal Growth, 2011, 328, pp.18-24 () (hal-00624850) |
| Rémy Parmentier, Fabien Lemarchand, Michel Cathelinaud, Michel Lequime, Claude Amra, Stéphane Labat, Stephanie Escoubas, Franck Bocquet, Ahmed Charaï, Olivier Thomas, Christian Dominici, Piezoelectric tantalum pentoxide studied for optical tunable applications, Applied optics, 2002, 41, pp.3270-3276 (10.1364/AO.41.003270) (hal-01324143) |
| R. Parmentier, F. Lemarchand, M. Cathelinaud, M. Lequime, C. Amra, Stéphane Labat, Stephanie Escoubas, F. Bocquet, A. Charai, O. Thomas, C. Dominici, Piezoelectric Tantalum Pentoxide Studied for Optical Tunable Applications, Applied optics, 2002, 41, pp.3270-3276 () (hal-00081161) |
| R. Parmentier, F. Lemarchand, M. Cathelinaud, Y. Courcol, G. Albrand, M. Lequime, C. Amra, Stéphane Labat, Stephanie Escoubas, F. Bocquet, O. Thomas, C. Dominici, A. Charaï, Towards tunable optical filters ?, Optical Interference Coatings Conference, 2001 () (hal-00082149) |
